Resumen
This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This document is not intended to cover the use of special multilayered systems such as delta doped layers.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2022-11Etapa: Norma Internacional publicada [60.60]
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Edición: 3Número de páginas: 17
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Comité Técnico :ISO/TC 201/SC 4ICS :71.040.40
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Ciclo de vida
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Anteriormente
RetiradaISO 14606:2015
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Ahora
