Draft
International StandardISO/DIS 4508
Surface chemical analysis — Scanning probe microscopy — Guideline for the method and procedure for determining the temperature effects on AFM dimensional measurements
Reference number
ISO/DIS 4508
ISO/DIS 4508
Edition 1
© ISO 2025
Projet Norme internationale
ISO/DIS 4508
80040
Projet de Norme internationale au stade enquête auprès des membres de l’ISO.
Résumé
This International Standard specifies the guidelines of the method and procedure for determining the effect of temperature on atomic force microscope (AFM) nano-scale dimension measurements. The effect of temperature can be evaluated by continuously measuring the changes of the X- and Y- pitches and height of a two-dimensional (2D) calibration grating in an environmental temperature controllable AFM. If necessary, this method and procedure can be used to evaluate the effect of temperature on dimension measurement of other scanning probe microscopes(SPMs).
Informations générales
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État actuel: Projet
Vous pouvez contribuer à l’élaboration de ce projet de Norme internationale en contactant le membre national
Stade: Mise au vote du DIS: 12 semaines [40.20] -
Edition: 1
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Comité technique :ISO/TC 201/SC 9ICS :71.040.40
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