Reference number
ISO 18516:2006
© ISO 2025
ISO 18516:2006
Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Determination of lateral resolution
Edition 1
2006-11
Withdrawn
Withdrawn (Edition 1, 2006)

Abstract

ISO 18516:2006 describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 micrometre. The grid method is suitable if the lateral resolution is expected to be less than 1 micrometre but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.

Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.

General information

  • Status
     : Withdrawn
    Publication date
     : 2006-11
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 24
  • Technical Committee :
    ISO/TC 201/SC 2
    ICS :
    71.040.40 
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