International Standard
ISO 14644-2:2015
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Reference number
ISO 14644-2:2015
Edition 2
2015-12
© ISO 2024
International Standard
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Published (Edition 2, 2015)
This standard was last reviewed and confirmed in 2021. Therefore this version remains current.

ISO 14644-2:2015

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CHF 96
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Abstract

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

General information

  • Status
     : Published
    Publication date
     : 2015-12
    Stage
    : International Standard confirmed [90.93]
  • Edition
     : 2
    Number of pages
     : 14
  • Technical Committee :
    ISO/TC 209
    ICS :
    13.040.35 
  • RSS updates

Life cycle

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goals

3
Good Health and Well-being
9
Industry, Innovation and Infrastructure

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