Reference number
ISO 11952:2019
International Standard
ISO 11952:2019
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
Edition 2
2019-05
Read sample
ISO 11952:2019
67552
Published (Edition 2, 2019)
This publication was last reviewed and confirmed in 2024. Therefore this version remains current.

Abstract

This document specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

This document has the following objectives:

— to increase the comparability of measurements of geometrical quantities made using SPMs by traceability to the unit of length;

— to define the minimum requirements for the calibration process and the conditions of acceptance;

— to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category to the instrument);

— to define the scope of the calibration (conditions of measurement and environments, ranges of measurement, temporal stability, transferability);

— to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple geometrical quantities in measurements using an SPM;

— to define the requirements for reporting results.

General information

  •  : Published
     : 2019-05
    : International Standard confirmed [90.93]
  •  : 2
     : 58
  • ISO/TC 201/SC 9
    71.040.40 
  • RSS updates

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