ISO 14606:2022

Published (Edition 3, 2022)

ISO 14606:2022

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Abstract

This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.

This document is not intended to cover the use of special multilayered systems such as delta doped layers.

General information

Status
: Published

Publication date
: 2022-11

Stage
: International Standard published [60.60]
Edition
: 3

Number of pages
: 17
Technical Committee :
ISO/TC 201/SC 4

ICS :
71.040.40
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